Simrit develops FKMs for semiconductor uses

ERJ staff report (BD - (R&PN)

Plymouth Michigan -- Freudenberg-NOK G.P.'s Simrit Division has developed a new range of fluorocarbon compounds ideal for semiconductor applications requiring high purity and zero contaminants.

The FKM materials-called VO628 and VO793-were unveiled at the SEMICON West trade show, held July 13-15 in San Francisco, the company said.

VO628 is a 65 nominal Shore A hardness FKM compound, while VO793 is a similar 75 nominal Shore A formulation. Both materials are brown-colored and made with no fillers and minimal metal ion impurities to provide superior high-temperature and long-term compression set characteristics compared to traditional FKM elastomers, Simrit said.

High-purity rubber seals and low-metal ion impurities are critical to ensuring that no contaminants go into the clean-room production of semiconductor wafers and chips, said Robert W. Keller, Simrit materials development manager. Contaminating the production process can be a huge expense to the chip manufacturer, he said.

Smaller components like seals are an often overlooked-but extremely critical-part of the process, he said.

“As a materials specialist, it is our job to ensure industry innovations are possible by developing compounds that can withstand the evolving chemicals, temperatures and materials that threaten traditional semiconductor applications,” Keller said.

These latest material developments offer superior purity while still providing the extreme performance requirements the semiconductor industry demands, he said. VO628 and VO793 were created specifically for use in semiconductor fabrication processes, and both materials can be utilised in a variety of products, including O-rings and bonded gates.

Offering excellent resistance to oxygen etch and oxygen plasma systems and top performance in rapid pump-down high-vacuum systems, VO628 and VO793 are useful in semiconductor applications requiring rapid development of high vacuum levels, Simrit said.

The company makes O-rings and molded parts from the compounds it develops but does not sell the materials to other manufacturers. “Our proprietary materials are one of our primary advantages in the marketplace,” Keller said.

Simrit does, however, sell the parts to original equipment manufacturers that make machines that produce the chips and fabricators who make the chips themselves within the semiconductor market, he said. The new compounds will be supplied to markets worldwide, in particular the quickly growing Southeast Asia region.

From Tire Business (A Crain publication)

Press release from Simrit